The College of Engineering Microfabrication Facility at the University of Utah is a multi-purpose cleanroom facility with approximately 5300 ft2 of laboratory floor space which provides the clean environment necessary for semiconductor materials and device research, micromachining, microfabrication, and semiconductor materials systems research. The laboratory has equipment for the deposition of materials (i.e., sputtering, electron beam evaporation, thermal evaporation, plasma enhanced chemical vapor deposition, low pressure chemical vapor deposition poly silicon and silicon nitride), photolithography (e.g., Cr-on-glass and emulsion mask making, photoresist spinners and coaters, hot plates, ovens, mask aligners, CAD design stations), an atomic force microscope (AFM), test / characterization / inspection equipment, and many other planar processes necessary for micro system research and characterization. Complete mask making facilities include an Electromask TRE Criss-Cross pattern generator with step and repeat camera and environmental control for repeatable high performance. The laboratory also has B, P solid state diffusion furnaces, annealing furnaces, and wet/dry oxidation furnaces. Click here for a pdf version of the equipment list.