Waveguide Technology Based on SiOxNy

Instructions:

The Links bellow contain information pertaining to the process of waveguide fabrication based on SiOxNy. Please follow the links for more information.

Files:

• Technology Description
• Devices
• Fabrication Processes
• CAD Files, Tools and Layouts
• Microsystem Characterization
• Equipment and Supplies
• Roadmap
• References

U. of U. Microfabrication Laboratory Home page.